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We report on the properties of laser-induced plasma plumes generated by ns pulsed excimer lasers as used for pulsed laser deposition to prepare thin oxide films. A focus is on the time and spatial evolution of chemical species in the plasma plume as well as the mechanisms related to the plume expansion. The overall dynamics of such a plume is governed by the species composition in particular if three or more elements are involved. We studied the temporal evolution of the plume, the composition of the chemical species in the plasma, as well as their electric charge. In particular, ionized species can have an important influence on film growth. Likewise, the different oxygen sources contributing to the overall oxygen content of an oxide film are presented and discussed. Important for the growth of oxide thin films is the compositional transfer of light element such as oxygen or Li. We will show and discuss how to monitor these light elements using plasma spectroscopy and plasma imaging and outline some consequences of our experimental results., Applied Physics A, 129 (2), ISSN:0947-8396, ISSN:1432-0630, ISSN:0340-3793

10 pags., 5 figs., 1 tab., Thin films of silicon carbide (SiC) on Si (100) and SrTiO (100) substrates have been grown by nanosecond pulsed laser deposition (PLD) with a Q-switched Nd:YAG laser operating at the wavelengths of 1064, 532 and 266 nm. The deposits obtained consisted of smooth and uniform layers of amorphous SiC, free of holes and cracks, with thicknesses in the range of 30–100 nm and average roughness substantially lower than 1 nm. The role of laser wavelength and of substrate temperature (300 K vs. 1025 K) on morphology, crystallinity and composition of the deposits was assessed. The films were analyzed by X-ray diffraction, micro-Raman spectroscopy and X-ray photoelectron spectroscopy. In addition, optical emission spectroscopy was employed to evaluate the characteristics of the ablation plasma and its correlation with the film growth., This research was supported by the Spanish State Research Agency (AEI) and European Regional Development (FEDER) through Projects PID2019-106125GB-I00/AEI/0.13039/501100011033 and PID2019-104124RB-I00/AEI/0.13039/501100011033. Thanks are given to the Soft and Polymeric Matter group (IEM-CSIC) for the use of AFM. We are grateful to M. Furió from MNCN-CSIC and P. Gonzalez from ICTP-CSIC for Raman and X-ray difraction technical assistance, respectively. Funding Open Access funding provided thanks to the CRUE-CSIC agreement with Springer Nature.