Search

Using scanning X-ray microdiffraction with a 50 µmφ micro-beam and a newly developed two-dimensional detector, the crystal and domain structures were analyzed for a 2.4-µm-thick epitaxial Pb(Zr0.43Ti0.57)O3 film directly underneath a 200 µmφ Pt top-electrode before and after applying an electric field. An obvious extrinsic 90°-domain rotation was observed and the volume fraction of c-domain was increased from ∼42 to ∼71% by an applied electric field over the coercive field. This phenomenon induced a large ferroelectric remanent polarization (Pr∼60 µC/cm2) which is an unforeseeable value from an as-grown state of Pb(Zr0.43Ti0.57)O3 film. [ABSTRACT FROM AUTHOR]

(100)/(001)-oriented tetragonal Pb(Zr,Ti)O3 (PZT) films, which were thicker than 2 µm, were epitaxially grown on SrRuO3-covered (100)Si, (100)KTaO3, (100)SrTiO3, and (100)CaF2 substrates by metal organic chemical vapor deposition. The volume fraction of the (001)-orientation almost linearly increased as the thermal strain increased during the cooling process from the deposition temperature to the Curie temperature. Consequently, perfectly (001)-oriented, i.e., polar-axis-oriented, thick films were obtained on CaF2 substrates with a remanent polarization of 71 µC/cm2. This approach to grow polar-axis-oriented PZT thick films enabled the intrinsic piezoelectricity of PZT itself to be clarified, and has potential in novel applications. [ABSTRACT FROM AUTHOR]