1. CMOS-compatible self-aligned 3D memristive elements for reservoir computing systems
- Author
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Aleksandra A. Koroleva, Dmitry S. Kuzmichev, Maxim G. Kozodaev, Ivan V. Zabrosaev, Evgeny V. Korostylev, and Andrey M. Markeev
- Subjects
Physics and Astronomy (miscellaneous) - Abstract
Neuromorphic capabilities of a self-aligned complementary metal-oxide-semiconductor compatible W/WOx/HfO2/Ru cell in a 3D vertical memristive structure were investigated. We show that the device exhibits nonfilamentary forming-free multilevel resistive switching with gradual resistance change. In addition, the poor retention of a low resistance state allows integration of these structures in architectures that require short-term memory characteristics such as reservoir computing systems. The ability of the device to rely on the temporal sequence of the stream was tested with the digit recognition task. Since a WOx layer was obtained by thermal oxidization and HfO2 and Ru layers were grown by atomic layer deposition methods, the device is suitable for high-density systems with high connectivity within a neural network.
- Published
- 2023