1. Electrical characterization of phosphorus-doped n-type homoepitaxial diamond layers by Schottky barrier diodes
- Author
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Satoshi Koizumi, Tomio Ono, Mariko Suzuki, Naoshi Sakuma, Hiroaki Yoshida, and Tadashi Sakai
- Subjects
Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,Schottky barrier ,Phosphorus ,Schottky diode ,chemistry.chemical_element ,Diamond ,engineering.material ,Capacitance ,chemistry ,Electrical resistivity and conductivity ,engineering ,Optoelectronics ,business ,Layer (electronics) ,Diode - Abstract
Temperature-dependent current–voltage (I–V), capacitance–voltage (C–V) measurements, and frequency-dependent C–V measurements have been carried out to investigate electrical properties of phosphorus (P)-doped n-type homoepitaxial diamond layers. We have fabricated lateral dot-and-plane (with ring-shaped-gap) Schottky barrier diodes. Frequency-dependent capacitance measurements revealed the existence of a deep donor level. C–V measurements deduced that the net donor concentration was 6.2×1017 cm−3 and the corresponding built-in potential was 4.0 eV, when the P concentration was 8.3×1017 cm−3. Phosphorus electrical activity was 0.75 in the P-doped diamond layer. The carrier thermal activation energy (the donor level) was evaluated to be 0.6 eV from the relation between the net donor concentration and the carrier concentration.
- Published
- 2004
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