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Start Over Author "Oh, Sang-Hyun" Journal applied physics letters
9 results on '"Oh, Sang-Hyun"'

9. Degradation of ferroelectric properties in integrated Pt/SrBi[sub 2]Ta[sub 2]O[sub 9]/Pt capacitor by impurity diffusion from interlevel dielectric layer.

Author

Oh, Sang-Hyun, Hong, Suk-Kyoung, Kim, Jin Gu, Seong, Jin Yong, Park, Young-Jin, and Lee, Deok-Won

Subjects
*FERROELECTRICITY, *CAPACITORS, *DIFFUSION
Abstract

The ferroelectric properties of integrated Pt/SrBi[SUB2]Ta[SUB2]O[SUB9] (SBT)/Pt capacitors with boron (B)- and phosphorus (P)-doped silicate glass (BPSG) as an interlevel dielectric layer were investigated. After annealing at 800 °C to densify the BPSG, a significant reduction in remanent polarization was observed. Both transmission electron microscopy and nanoprobe energy dispersive spectroscopy analysis showed bismuth (Bi) and P interdiffusion across the interface between the SBT and BPSG layers. This strongly suggests that Pt/SBT/Pt capacitor degradation results from Bi loss in the surface region of the SBT layer, which is induced by P diffusion into the SBT. The degradation in ferroelectric properties was prevented by inserting a thin undoped silicate glass (USG) layer between the SBT and the BPSG, which blocked P diffusion. From the USG thickness dependence of the remanent polarization, P-induced degradation was also verified. [ABSTRACT FROM AUTHOR]

Published
2002
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