1. Near-field-enhanced, mold-assisted, parallel direct nanostructuring of a gold thin film on glass
- Author
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Shaochen Chen, D. B. Shao, and S. F. Li
- Subjects
Nanostructure ,Materials science ,Physics and Astronomy (miscellaneous) ,Silicon ,business.industry ,Silicon dioxide ,chemistry.chemical_element ,Laser ,Evaporation (deposition) ,law.invention ,chemistry.chemical_compound ,Optics ,Vacuum deposition ,chemistry ,law ,Optoelectronics ,Thin film ,business ,Microfabrication - Abstract
In this report, near-field enhancement around nanoridges and nanotips upon 532nm pulsed laser irradiation is utilized to produce line or dot pattern on gold thin films deposited on glass substrates. The ridges and tips, which have end radii on the order of 50nm, were fabricated out of silicon dioxide thin film on silicon by microfabrication techniques. A 30nm chromium thin film was evaporated onto the ridges or tips by e-beam evaporation to enhance the near-field effect. Line and dot array were successfully patterned on the Au film with feature size ranging from 100 to 200nm. Results from numerical simulation using finite difference time domain method agree with experimental results.
- Published
- 2004
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