1. Mechanism of particle removal by megasonic waves
- Author
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Wonjung Kim, Tae-Hong Kim, Jae Hyuck Choi, and Ho-Young Kim
- Subjects
Mechanism (engineering) ,Materials science ,Physics and Astronomy (miscellaneous) ,Chemical physics ,Microbubbles ,Analytical chemistry ,Megasonic cleaning ,Particle ,Microparticle ,Pressure gradient - Abstract
We elucidate the major mechanism of microparticle removal in the megasonic cleaning process through the direct visualization experiments. It is revealed that particles sitting on solids are removed by adjacent microbubbles that oscillate near the substrates and exert interfacial and pressure gradient forces on the particles. Other pressure and streaming effects are shown to be too weak to detach the particles.
- Published
- 2009
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