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Start Over Author "Tan, Y.-Y." Journal applied physics letters
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2. Force based displacement measurement in micromechanical devices.

Author

O'Shea, S. J., Ng, C. K., Tan, Y. Y., Xu, Y., Tay, E. H., Chua, B. L., Tien, N. C., Tang, X. S., and Chen, W. T.

Subjects
MICROELECTROMECHANICAL systems, ATOMIC force microscopy, ACCELEROMETERS, ELECTROSTATICS
Abstract

We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm. © 2001 American Institute of Physics. [ABSTRACT FROM AUTHOR]

Published
2001
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