1. Low-temperature wafer-scale growth of MoS2-graphene heterostructures.
- Author
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Kim, Hyeong-U, Kim, Mansu, Jin, Yinhua, Hyeon, Yuhwan, Kim, Ki Seok, An, Byeong-Seon, Yang, Cheol-Woong, Kanade, Vinit, Moon, Ji-Yun, Yeom, Geun Yong, Whang, Dongmok, Lee, Jae-Hyun, and Kim, Taesung
- Subjects
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SEMICONDUCTOR wafers , *LOW temperatures , *GRAPHENE , *HETEROSTRUCTURES , *LAW of large numbers - Abstract
Graphical abstract Highlight • Practical growth for 2D MoS 2 -graphene heterostructure (MGH) was introduced. • Low-temperature sulfurization of Mo thin film was realized by H 2 S plasma. • As-grown MoS 2 film on graphene naturally contains large number of active sites. • The MGH was shown enhanced electrocatalytic performance. Abstract In this study, we successfully demonstrate the fabrication of a MoS 2 -graphene heterostructure (MGH) on a 4 inch wafer at 300 °C by depositing a thin Mo film seed layer on graphene followed by sulfurization using H 2 S plasma. By utilizing Raman spectroscopy and high-resolution transmission electron microscopy, we have confirmed that 5–6 MoS 2 layers with a large density of sulfur vacancies are grown uniformly on the entire substrate. The chemical composition of MoS 2 on graphene was evaluated by X-ray photoelectron spectroscopy, which confirmed the atomic ratio of Mo to S to be 1:1.78, which is much lower than the stoichiometric value of 2 from standard MoS 2. To exploit the properties of the nanocrystalline and defective MGH film obtained in our process, we have utilized it as a catalyst for hydrodesulfurization and as an electrocatalyst for the hydrogen evolution reaction. Compared to MoS 2 grown on an amorphous SiO 2 substrate, the MGH has smaller onset potential and Tafel slope, indicating its enhanced catalytic performance. Our practical growth approach can be applied to other two-dimensional crystals, which are potentially used in a wide range of applications such as electronic devices and catalysis. [ABSTRACT FROM AUTHOR]
- Published
- 2019
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