15 results on '"Lee, Won Jun"'
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2. Surface reaction during thermal atomic layer etching of aluminum oxide films using fluorine radicals and trimethylaluminum
3. Surface reaction mechanism of atomic layer deposition of niobium oxide: In situ characterization and first-principle study
4. Density functional theory study on the selective capping of cobalt on copper interconnect
5. Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2- and 3-step atomic layer deposition process
6. Effect of deposition temperature and surface reactions in atomic layer deposition of silicon oxide using Bis(diethylamino)silane and ozone
7. Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory
8. Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules
9. Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor
10. Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride
11. Corrigendum to “Effect of deposition temperature and surface reactions in atomic layer deposition of silicon oxide using Bis(diethylamino)Silane and ozone”. [Appl. Surf. Sci. 571 (2022) 151231]
12. Surface reaction of silicon chlorides during atomic layer deposition of silicon nitride
13. Corrigendum to “Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules” [Appl. Surf. Sci. 554 (2021) 149481]
14. Adhesion and interface chemical reactions of Cu/polyimide and Cu/TiN by XPS
15. Adhesion and interface chemical reactions of Cu/polyimide and Cu/TiN by XPS
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