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Start Over Author "Takeno, S" Journal applied surface science
4 results on '"Takeno, S"'

4. Laser-assisted atom probe tomography of 18O-enriched oxide thin film for quantitative analysis of oxygen.

Author

Kinno, T., Tomita, M., Ohkubo, T., Takeno, S., and Hono, K.

Subjects
*TOMOGRAPHY, *SILICA, *THIN films, *QUANTITATIVE research, *OXYGEN, *MASS transfer
Abstract

Highlights: [•] Laser-assisted atom probe tomography (LA-APT) was applied to SiO2 thin film on Si substrates with the 16O:18O ratio of around 1:1. [•] The peaks at mass/charge of 16 and 18 were dominated by O+, not by O2 ++. [•] The calculated elemental composition indicated significant loss of oxygen in LA-APT analysis of SiO2. [ABSTRACT FROM AUTHOR]

Published
2014
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