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By means of the monolithic integrated circuit techniques with the plasma polymerization method, a reference field effect transistor (REFET) has been developed to be used with the ion-selective field effect transistors (ISFET’s). The gate insulator of the REFET is coated with a plasma polymerized styrene film. It was used in combination with the pH-ISFET to determine pH values. Experimental results compared favorably with those from the convetional glass electrode method.