18 results on '"Delabie, Annelies"'
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2. Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
3. Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion
4. Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism
5. MoS2Functionalization with a Sub-nm Thin SiO2Layer for Atomic Layer Deposition of High-κ Dielectrics
6. Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon
7. MoS2 Functionalization with a Sub-nm Thin SiO2 Layer for Atomic Layer Deposition of High-κ Dielectrics
8. Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties
9. Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
10. Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism.
11. Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon.
12. Two-Dimensional Crystal Grain Size Tuning in WS2Atomic Layer Deposition: An Insight in the Nucleation Mechanism
13. MoS2 Functionalization with a Sub-nm Thin SiO2 Layer for Atomic Layer Deposition of High-κ Dielectrics.
14. Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S.
15. Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2O
16. Surface Chemistry and Interface Formation during the Atomic Layer Deposition of Alumina from Trimethylaluminum and Water on Indium Phosphide
17. Reaction Chemistry during the Atomic Layer Depositionof Sc2O3and Gd2O3fromSc(MeCp)3, Gd(iPrCp)3, and H2O.
18. SurfaceChemistry and Interface Formation during theAtomic Layer Deposition of Alumina from Trimethylaluminum and Wateron Indium Phosphide.
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