1. Structure Stability of LaAlO 3 Thin Films on Si Substrates
- Author
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Xiang Wen-Feng, He Meng, Jin Kui-Juan, Yang Guo-Zhen, Liu Guo-Zhen, Lü Hui-Bin, and Zhou Yue-Liang
- Subjects
Diffraction ,Materials science ,Carbon film ,Chemical engineering ,Transmission electron microscopy ,law ,General Physics and Astronomy ,Deposition (phase transition) ,Thin film ,Epitaxy ,Laser ,Amorphous solid ,law.invention - Abstract
A series of amorphous and single-crystalline LaAlO3 (LAO) thin films are fabricated by laser molecular-beam epitaxy technique on Si substrates under various conditions of deposition. The structure stability of the LAO films annealed in high temperature and various ambients is studied by x-ray diffraction as well as high-resolution transmission electron microscopy. The results show that the epitaxial LAO films have very good stability, and the structures of amorphous LAO thin films depend strongly on the conditions of deposition and post-annealing. The results reveal that the formation of LAO composition during the deposition is very important for the structure stability of LAO thin films.
- Published
- 2007