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The nonlinear dynamics and control of micro electromechanical systems (MEMS) is an important topic at present and homotopy analysis method (HAM) is an effective semi-numerical and semi-analytical method for solving strongly nonlinear problems. In this paper, the parametric resonance of MEMS with multi-frequency excitation is studied by HAM. Firstly, the differential equation of electrostatically driven microbeam is processed by Taylor expansion, and it is transformed into the parametric motion model with multi-frequency excitation. Then, the approximate solution and amplitude–frequency response equation of the system are obtained by HAM, and compared with the numerical solution. Finally, the influence of direct current (DC) and alternating current (AC) on principal parametric resonance and superharmonic resonance is discussed. The results show that HAM is an effective method to analyze the parametric vibration of multi-frequency excitation system, and the amplitude–frequency response curve of microbeam about parametric motion depends on the time scale in high DC and high AC state. This study effectively extends the application of HAM in parametric resonance, which is of great significance to the study of nonlinear vibration of MEMS. • HAM is first used to analyze resonance under multi-frequency excitation. • Softening and hardening effect of microbeam depends on time. • Primary and superharmonic resonance of MEMS are further considered. • HAM is an effective method to study the multi-frequency excitation. [ABSTRACT FROM AUTHOR]