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Abstract: X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with submicron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2×1017 H+/cm2 protons. Preliminary results indicate that a measurable strain, on the order of 10−3, was introduced into the film near the End of Range (EOR) region of the protons. [Copyright &y& Elsevier]