Author: "Mertens, Paul" / Journal: ecs meeting abstracts - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Mertens, Paul"' showing total 6 results

Start Over Author "Mertens, Paul" Journal ecs meeting abstracts

6 results on '"Mertens, Paul"'

1. Quantitative Modelling of Residual Molecular Contamination in Low-Pressure Processing Environments.

Author: Mertens, Paul W.
Published: 2024
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2. Study of Mass Transport for Efficient Fluid Processing

Author: Mertens, Paul W., primary, Haslinger, Michael, additional, Soha, Marton, additional, and John, Joachim, additional
Published: 2017
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3. Contamination Specifications, an Overall Perspective

Author: Mertens, Paul W, primary
Published: 2015
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4. Evaluation of the Si0.8Ge0.2-on-Si Epitaxial Quality by Inline Surface Light Scattering: A Case Study on the Impact of Interfacial Oxygen

Author: Wostyn, Kurt, primary, Kenis, Karine, additional, Rondas, Dirk, additional, Loo, Roger, additional, Hikavyy, Andriy Yakovitch, additional, Dhayalan, Sathish, additional, Douhard, Bastien, additional, Mertens, Paul W., additional, Holsteyns, Frank, additional, De Gendt, Stefan, additional, Simpson, Gavin, additional, Bast, Gerhard, additional, and Swaminathan, Karthik, additional
Published: 2014
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5. Impact of Acoustical Reflections on Megasonic Cleaning Performance

Author: Brems, Steven, primary, Hauptmann, Marc, additional, Camerotto, Elisabeth, additional, Pacco, Antoine, additional, Halder, Sandip, additional, Zijlstra, Aaldert, additional, Geert, Doumen, additional, Bearda, Twan, additional, and Mertens, Paul, additional
Published: 2009
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6. Evaluation of the Degree of Damage After Different Conditions of He/H2 Dry Strip Plasma on Silica-based Porous Low-k Materials

Author: Kesters, Els, primary, Le, Quoc-Toan, additional, Boullart, Werner, additional, Qingyuan, Han, additional, Berry, Ivan, additional, Waldfried, Carlo, additional, Mertens, Paul, additional, and Heyns, Marc, additional
Published: 2006
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