Search

Your search keyword '"Baristiran Kaynak, Canan"' showing total 5 results
Start Over Author "Baristiran Kaynak, Canan" Journal ecs transactions
5 results on '"Baristiran Kaynak, Canan"'

4. (Invited) Si1-xGex/Si MQW Based Uncooled Microbolometer Development and Integration into 130 nm BiCMOS Technology

Author

Baristiran Kaynak, Canan, primary, Yamamoto, Yuji, additional, Göritz, Alexander, additional, Korndoerfer, Falk, additional, Zaumseil, Peter, additional, Kulse, Philipp, additional, Schulz, Katrin, additional, Fraschke, Mirko, additional, Marschmeyer, Steffen, additional, Wolansky, Dirk, additional, Wietstruck, Matthias, additional, Shafique, Atia, additional, Gurbuz, Yasar, additional, and Kaynak, Mehmet, additional

Published
2018
Full Text
View/download PDF

5. Alternative High-k Dielectrics for Metal-Insulator-Metal Applications

Author

Lukosius, Mindaugas, Baristiran Kaynak, Canan, Wenger, Christian, and Rushworth, Simon

Abstract

Atomic Vapor Deposition (AVD) technique was successfully applied for the depositions of amorphous HfO2, Sr-Ta-O and Ti-Ta-O thin films, which were investigated as alternative dielectrics to replace the standard SiO2 or Si3N4 dielectrics used in Metal-Insulator-Insulator (MIM) capacitors. Metal oxides were grown on 200 mm TiN/Si (100) substrates within the thermal budget of back-end-of-line (BEOL) process. Electrical properties, investigated after sputtering Au top electrodes, revealed that the main characteristics are different for each dielectric. On one hand, Ti-Ta-O based MIM capacitors possessed a dielectric constant of 50, which is more than a factor of 2 higher compared to the ones of Sr-Ta-O (20) and HfO2 (18). On the other hand, Sr-Ta-O based MIM capacitors showed the lowest leakage current densities as well as the smallest capacitance-voltage linearity coefficients.

Published
2010
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results