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Your search keyword '"Chi, Zong-Tao"' showing total 2 results
Start Over Author "Chi, Zong-Tao" Journal ferroelectrics
2 results on '"Chi, Zong-Tao"'

2. Fabrication and characteristics of VOx microbolometer integrated into gold black absorbing layer.

Author

Wang, Bin, Li, Ning, Xie, Wan-Feng, Lai, Jian-Jun, Wang, Shu-Ying, Zheng, Yu, Chi, Zong-Tao, Yu, Bing, Shen, You-Qing, and Cong, Hai-Lin

Subjects
SURFACES (Technology), VANADIUM oxide, THIN films, MICROMACHINING
Abstract

Using vanadium oxide (VOx) thin film as active layer, microbolometer with gold black absorber was fabricated due to the high mid-infrared (8-14μm) absorption property of gold black. This paper describes the design and fabrication of microbolometer with micromachining surface technology. The characteristics of the device are investigated. The detector performance exhibits maximum detectivity of 1.96 × 108cmHz1/2/W at 17 Hz with 8.8μA. [ABSTRACT FROM AUTHOR]

Published
2021
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