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Laser (Ar+, Pulsed excimer KrF) crystallization technique was used on rf-sputtered amorphous PZT thin films to decrease the substrate temperature during the fabrication of perovskite PZT thin films. The microstructure of the films was compared with those got through traditional oven treatment and rapid thermal process (RTP)

Structural phase transformations from pyrochlore and amorphous phases to perovskite phase were studied in PZT thin films deposited by RF magnetron sputtering technique. We have investigated the effect of fabrication conditions on this transformation usingX-ray diffraction, SEM and ICP techniques, and paid special attention to the differences between transformation from pyrochlore to perovskite and that from amorphous to perovskite. The possible reasons for affecting this transformation were discussed.