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Induced electric field (IEF), as an alternative non-conventional processing technique, is utilized to sterilize liquid foods. In this study, the survival and sublethal injury of S. aureus under IEF were investigated in 0.85% normal saline, and the inactivation mechanism of IEF was expounded. The plate count results showed that the sublethal injury rates remained above 90% after IEF treatment for more than 8.4 s, and 7.1 log CFU/mL of S. aureus was completely inactivated after 14 s IEF treatment. Scanning electron microscopy and transmission electron microscope images showed that IEF caused the destruction of cell membrane and internal substructure, and the damage to intracellular substructure was more severe. Altered membrane integrity or permeability was demonstrated through flow cytometry and confocal laser scanning microscope analysis, and the different damage to cells was quantified by propidium iodide & 5-carboxy fluorescein diacetate single and double staining. In addition, IEF treatment also decreased the membrane potential and esterase activity of S. aureus cells. Putative inactivation mechanism of IEF against S. aureus is a complex process, and its apoptosis is the result of the combination of several factors, which provide a basis for understanding the inactivation mechanism of IEF. [Display omitted] • Germicidal efficacy and inactivation mechanism of IEF on S. aureus were explored. • Sublethal injury rates remained above 90% after IEF treatment for more than 8.4 s. • IEF caused the destruction of cell membrane, substructure, and permeability. • IEF decreased the membrane potential and esterase activity of S. aureus cells. • Putative inactivation mechanism of IEF against S. aureus is a complex process. [ABSTRACT FROM AUTHOR]