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Start Over Author "T. Ushiroda" Journal ibm journal of research and development
1 results on '"T. Ushiroda"'

1. Effect of Substrate Bias on Properties of RF-Sputtered Cr–SiO Films

Author

Haruhiro Matino and T. Ushiroda

Subjects
Materials science, General Computer Science, business.industry, Electrical resistivity and conductivity, Electronic engineering, Substrate (chemistry), Optoelectronics, Cermet, business
Abstract

Properties of rf-sputtered Cr-SiO cermet films have been studied as a function of rf substrate bias. Films with five orders-of-magnitude change in electrical resistivity have been deposited from one Cr-SiO(5O:5O wt %) target by changing the substrate bias. Resistivities of about 200 Ω ċ cm at 5% bias and about 2 × 10-3 Ω ċ cm at 20% bias have been obtained.

Published
1977
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