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The authors report the design and fabrication of micromechanically tunable filters using a novel stable resonator geometry. The filters consist of a 1λ air-gap cavity with two InP/air-gap Bragg reflectors. The design of the micromechanical structure ensures a stable resonator geometry under actuation that provides constant performance throughout the entire tuning range of 65 nm. The devices are micromachined from a monolithic all epitaxial InP-InGaAs structure that can be integrated with an InP-based photo detector or emitter in a low-cost component for coarse wavelength division multiplexing systems operating in the 1.3 or 1.55 μm band [ABSTRACT FROM PUBLISHER]

We report the design and fabrication of micromechanically tunable filters with a 10-nm bandwidth for the 1550-nm wavelength range. The electrostatic actuation provides a tuning range of 30 nm and a low actuation power. The filters consist of a monolithic, vertical Fabry-Perot resonant cavity based on an epitaxial InGaAsP-InP Bragg reflector. An actuable InP micromechanical structure suspended over a 1×-thick air-gap provides for the tuning of the cavity. Our design aims primarily for a device that is simple, robust and that can be integrated with an InP-based photodetector or emitter in a low-cost component for optical data interconnects [ABSTRACT FROM PUBLISHER]