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Start Over Descriptor "Electrophoretic deposition -- Methods" Journal ieee transactions on components, hybrids, and manufacturing technology
1 results on '"Electrophoretic deposition -- Methods"'

1. Zero-defect sputter deposition metallization method for high volume manufacturing of grafted multilayer thin film modules

Author

Swirbel, Tom

Subjects
Sputtering (Physics) -- Research, Metallizing -- Research, Thin films, Multilayered -- Research, Thin film devices -- Research, Electrophoretic deposition -- Methods, Business, Engineering and manufacturing industries, Science and technology
Abstract

A new high-quantity in-line dc-magnetron sputter deposition metallization technique for the formation of grafted multilayer thin film modules was presented. The technique produced devices with high reliability and low defect levels and provided layered metal systems with either discrete or phased interfaces. When plasma optimization was used, deposit thickness variation over the deposition area was effectively controlled throughout the life of the targets.

Published
1993

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