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Start Over Author "Kim, Jin-Young" Publication Type Academic Journals Journal ieee transactions on components, packaging & manufacturing technology, part b Publisher ieee
1 results on '"Kim, Jin-Young"'

1. Composite and multilayered TaO...TiOy high dielectric constant thin films.

Author

Nielsen, Matthew C., Kim, Jin-Young, Rymaszewski, Eugene J., Toh-Ming Lu, Kumar, Atul, and Bakhru, H.

Subjects
*THIN films, *DIELECTRICS, *MULTICHIP modules (Microelectronics)
Abstract

Focuses on the development of a novel low temperature deposition process, using reactive pulsed dc magnetron sputtering, to deposit thin dielectric films. Description of these dielectric films; Use of quality high dielectric thin films in multi-chip module (MCM) and dynamic random access memory (DRAM) applications; Experiments conducted in this research.

Published
1998
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