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In this paper, we report the characterization and modeling of multi-finger gate all around (GAA) nanowire (NW) FETs (NWFETs) from dc to 14 GHz. The self-heating effect (SHE) in NWFETs is investigated experimentally using the small-signal output conductance (${g}_{{\text {ds}}}$) technique. The frequency-dependent complex thermal impedance, ${Z}_{{\text {th}}}({f})$ , is extracted by fitting an ${n}$ th-order thermal network with the experimental data. We show that the temperature rise $\Delta {T}$ (=85 °C) due to SHE is significant in short-channel silicon on insulator (SOI) NWFETs. Finally, we have evaluated the RF figure of merit (FOM) for these NWFETs as ${f}_{T}$ (=70 GHz) and ${f}_{\text {max}}$ (=80 GHz). We also report the RF performance metric sensitivity on temperature, $\partial {f}_{\text {max}}/\partial {T}_{{\text {amb}}}$ ($\approx -0.104$ GHz/K). The reported BSIM-CMG compact model shows a good correlation with the measurement data. [ABSTRACT FROM AUTHOR]

Self-heating in fully depleted silicon-on-insulator (FDSOI) metal–oxide–semiconductor field-effect transistors (MOSFETs) is experimentally studied using the gate resistance thermometry technique, in a wide temperature range from 300 down to 4.2 K. We demonstrate that below 160 K, the channel temperature increase ($\Delta {T}$) due to self-heating starts to deviate significantly from the linear variation with the dissipated power, leading to an apparent power dependent thermal resistance. This power dependence is interpreted in terms of temperature dependent thermal conductivity. The thermal resistance dependence on the active device temperature (${T}_{\text {Device}}$) indicates that the former one is mainly driven by the thermal conductivity of the oxide layer. Moreover, based on this dependence we reconstructed the channel temperature increase for each dissipated power and ambient temperature, and we found that the calculated values were in a good agreement with the experimental ones. Results indicate that even at low temperatures, thermal resistance does not depend significantly on the silicon channel thickness (ranging from 7 up to 24 nm), whereas the buried-oxide thinning (145 and 25 nm) strongly reduces the magnitude of the thermal resistance. Finally, this paper intends to fill the gap of experimental data concerning self-heating in advanced FDSOI transistors at low temperatures, revealing limitations and perspectives that should be taken into account for future work. [ABSTRACT FROM AUTHOR]