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The introduction of metal nanocrystals (NCs) has been confirmed to improve electrical uniformity of oxide-based resistive random access memory (RRAM) devices significantly; however, the current reports do not systematically elucidate the relationship between the size/distribution of NCs and the electrical uniformity of RRAM devices. In this paper, we focused on the impact of metal NCs size and areal density on the resistive switching (RS) performances of oxide RRAM by atomic layer deposition (ALD) based on the experimental results and theoretical calculation. The dependence of ALD cycles of 50–130 during Pt or CoPtx NCs growth on the RS parameters of Al2O3 or HfO2 memory units has been evaluated systematically. The RRAM embedded Pt or CoPtx NCs shows the trends: with increasing ALD cycles, the forming voltage, set/reset voltage, the resistance in off and on state, and ${R}_{ \mathrm{\scriptscriptstyle OFF}}/{R}_{ \mathrm{\scriptscriptstyle ON}}$ ratio entirely first decrease, then flatten, and increase later with a minimum value at about 100 cycles. Although all metal NCs with various sizes enhance the electric field strength compared to at the planar region, only metal NCs with proper NCs size and areal density (9 nm/6– $10\times 10^{\textsf {11}}$ /cm2 in this paper) can effectively produce stronger localized electric field at the tip of metal NCs, leading to optimal RS behavior. [ABSTRACT FROM AUTHOR]

This paper presents a ternary content-addressable memory (TCAM) cell based on a skewed straintronic magnetotunneling junction (MTJ) switch. A straintronic magnetotunneling junction (s-MTJ) is a three-terminal switch, where the resistance between two of the terminals switches when a potential is applied to the third (gate) terminal that induces strain in the magnetostrictive free-layer. An s-MTJ is a highly energy-efficient switch that would dissipate only ~aJ of energy during switching. This paper discusses a novel variant of s-MTJ, namely skewed s-MTJ (ss-MTJ), where the MTJ switching can be controlled by two gate terminals. The current through an ss-MTJ is minimum when the potentials at the first and second gate terminals ( V2 and V3 , respectively) obey the relation V3 = V2+VF . Here, VF is a fixed voltage (“offset voltage”). Current in an ss-MTJ increases steeply when V2 and V3 deviate from the above “match” condition. This unconventional I – V characteristic of an ss-MTJ is exploited to design a non-Boolean TCAM cell based on just one transistor, one trench capacitor, and one ss-MTJ. We also discuss search and write operations in the ss-MTJ-TCAM cell, and show that the cell requires very small voltages to operate because of the unique I – V characteristics of the ss-MTJ. [ABSTRACT FROM PUBLISHER]

This paper investigates the issues of oxygen accumulation and variation in the high-resistance state of HfO2-based resistive random access memory (RRAM), with improvement attained by inserting a thin oxygen-vacancy-rich layer of indium-tin-oxide (ITO) film. By acting as the oxygen ion reservoir, this ITO thin film on the TiN electrode can further stabilize resistance switching (RS) characteristics. In terms of reliability, ac endurance, and retention tests confirm stable RS characteristics for the Pt/HfO2/ITO/TiN device. Finally, a conducting model was proposed to explain the influence of the ITO thin layer and clarify the physical mechanism of electrical improvements. [ABSTRACT FROM AUTHOR]

Resistive random access memory (ReRAM), a new emerging nonvolatile memory technology based on changes in electrical resistivity of a dielectric film, offers promising advantages such as scalability, fast switching, and low operation voltage. However, for ReRAM to become a successful technology, it is necessary to accurately control the stochastic nature of the conductive nanoscale filaments (CNFs) that governs the resistive switching (RS) behavior of the device and limits its long-term stability and reliability. In this paper, we developed a highly scalable nanostructured/textured electrode that is composed of an array of Al nanotips based on an anodic aluminum oxide template. The nanotips improve the RS characteristics by intensifying the electric field at the apex of each nanotip which is demonstrated using numerical simulations. The localized electric field induces the repetitive nucleation/ formation/rupture of the CNFs in a more controlled fashion compared to a flat Al electrode. As a result, the nanotip sample exhibits uniform and reduced forming/reset voltages as low as 4.70 ± 0.98V/1.00 ± 0.19 V, stable endurance, and long-term retention. As a result, we were able to achieve ultralow-power and error-free operation of 100 cells covering a large area, significantly demonstrating improved uniformity and reliability compared to devices made using flat Al electrodes. This universal bottom-up strategy of self-organized nanostructured-electrodes provides a pathway toward large-scale, highly reliable, and RS memory devices. [ABSTRACT FROM AUTHOR]

In the study of resistive random access memory using GeTeOx film as the switching layer, the device performed excellent property of bipolar resistive switching (BRS), which could be gradually transformed to the complementary resistive switching (CRS) by varying SET process current compliance. The conductive filament conduction mechanism of BRS could be verified by electrical characteristics and reliable data fitting. Through increasing current compliance of the SET process, CRS could be achieved due to higher activity of oxygen vacancies originated from the intensified thermal effect. This paper was beneficial to understand the switching mechanisms of BRS and CRS and provide a method to realize interconversion. Moreover, it was also a potential and promising device to be applied in the neurosynaptic biomimetic field. [ABSTRACT FROM AUTHOR]

An intentionally introduced interface layer in the resistive random-access memory (RRAM) devices play an important role in the improvement of resistive switching characteristics. In this paper, the resistive switching characteristics of ZrO2-based RRAM devices by inserting a thin TiO2 interface layer between electrodes and ZrO2 resistive switching layer were investigated. Compared with the Cu/ZrO2/Pt and Cu/ZrO2/TiO2/Pt devices, the Cu/TiO2/ZrO2/Pt and Cu/TiO2/ZrO2/TiO2/Pt devices showed much improved programing voltages, including lower forming voltage and lower set voltage. Moreover, the reset current was also improved. These results indicate that the TiO2 interface layer between the anode electrode and the resistive switching layer plays an important role in improving device performance. [ABSTRACT FROM AUTHOR]

When developing silicon carbide (SiC) devices, the reliability of the internal body diode is an important issue. Stacking faults (SFs) are expanded from basal plane defects by using a body diode. Although it is well known that ON-voltage degradation occurs due to SFs, their effects on dynamic reliability have not been studied well. Furthermore, including the effects of SFs, there are not many reports about the dynamic reliability of SiC-MOSFETs. In this paper, a double-pulse switching test using 3.3-kV SiC-MOSFETs was carried out to clarify the failure mechanism of the switching operation of SiC-MOSFETs and effects of SFs on the safe operation area (SOA). Before the switching test, current stress was applied to the body diode of the devices under test (DUTs) to expand the SFs. The circuit configuration was half-bridge type, and a double-pulse gate signal was applied to the lower arm DUT. The switching voltage was 1.8 kV, and the switching current increased at about 8-A steps to failure. As a result, reverse recovery SOA (RRSOA) reliability decreased depending on the amount of SFs in the SiC-MOSFET. Because RRSOA failure was caused by avalanche due to the hole concentration during reverse recovery and the SFs raised local current density, reverse bias SOA (RBSOA) hardly decreased even if SFs containing SiC-MOSFETs were used. This is because RBSOA failure was caused by degradation of the gate isolation layer due to overheating and the temperature coefficient of the SFs electric resistance indicated negative. [ABSTRACT FROM AUTHOR]

The switching properties of Te and TeTiW top electrodes (TEs) on TiW/SiN/TiN resistive switching memory devices are explored in this paper. The TeTiW TE device exhibits more favorable bipolar resistive switching behavior because of the decrease in binding energy after its use. This finding is confirmed through X-ray photoelectron spectroscopy analyses. The filament of the TeTiW TE device is metal like after forming, and the reset process corresponds with the thermal-dissolution mechanism. A physical model based on a Te filament is constructed to explain such phenomena. The TeTiW TE device provides the excellent endurance of more than 104 cycles, with an ON/OFF ratio of 500. The improvement can be attributed to the filament’s robustness during the forming and set processes, which prevent its diffusion even at high temperature. The device also features long retention for up to 104 s at 225 °C without stress, and 104 s at 85 °C with stress of −0.3 V. Therefore, it has high potential for high-density nonvolatile memory applications. [ABSTRACT FROM AUTHOR]

In this paper, we demonstrate the linear conductance-change characteristics of a conductive-bridging RAM (CBRAM) to be employed as an artificial synapse device in neuromorphic systems. The CBRAM with a bilayer electrolyte structure (${\mathrm {Cu/Cu}}_{{2}-{x}}\text{S}$ / $\mathrm {WO}_{{3}-{x}}$ /W) exhibits analog switching behavior during the depression process due to the well-controlled dissolution of the conductive filament. To analyze the origin of this motion, we investigate the effective voltage applied to $\mathrm {Cu}_{{2}-{x}}\text{S}$ and $\mathrm {WO}_{{3}-{x}}$. Our findings reveal that $\mathrm {Cu}_{{2}-{x}}\text{S}$ , acting as a voltage divider, helps in suppressing the large voltage drop in $\mathrm {WO}_{{3}-{x}}$ , where the formation/dissolution of filament occurs. Furthermore, due to the diode-like characteristics of $\mathrm {Cu}_{{2}-{x}}\text{S}$ and the division of voltage drop between $\mathrm {WO}_{{3}-{x}}$ and $\mathrm {Cu}_{{2}-{x}}\text{S}$ , an optimum programming energy is applied to $\mathrm {WO}_{{3}-{x}}$ during the depression process. This leads to linear conductance-change characteristics under identical pulses. However, abrupt conductance-change characteristics are observed during the potentiation process. Thus, we use only the device characteristics of the depression part for the neuromorphic system. An excellent classification accuracy is achieved due to the linear conductance-change characteristics and optimized pulse conditions. [ABSTRACT FROM AUTHOR]

The cross-point architecture for memory arrays is widely considered as one of the most attractive solutions for storage and memory circuits thanks to simplicity, scalability, small cell size, and consequently high density and low cost. Cost-scalable vertical 3-D cross-point architectures, in particular, offer the opportunity to challenge Flash memory with comparable density and cost. To develop scalable cross-point arrays, however, select devices with sufficient ON–OFF ratio, current capability, and endurance must be available. This paper presents a select device technology based on volatile resistive switching with Cu and Ag top electrode and silicon oxide (SiOx) switching materials. The select device displays ultrahigh resistance window and good current capability exceeding 2 MAcm−2. Retention study shows a stochastic voltage-dependent ON–OFF transition time in the 10~\mu \texts –1 ms range, which needs to be further optimized for fast memory operation in storage class memory arrays. [ABSTRACT FROM PUBLISHER]

Ferroelectric (FE) hafnium oxide is a promising candidate for memory applications. In this paper, endurance, imprint, and retention tests are carried out on FE aluminum-doped hafnium oxide thin films with different electrodes: 1) metal–insulator–metal (MIM) and 2) silicon–insulator–silicon(SIS). MIM devices exhibit higher endurance than SIS devices. However, SIS devices show superior imprint and retention, with an extrapolated retention time-to-failure larger than 10 years at 85 °C. These results are very promising to integrate FE-HfO2 in 3-D structures, either for dynamic random access memory or for NAND applications. [ABSTRACT FROM PUBLISHER]

Resistive-switching random access memory (RRAM) is widely considered as a disruptive technology. Despite tremendous efforts in theoretical modeling and physical analysis, details of how the conductive filament (CF) in metal-oxide-based filamentary RRAM devices is modified during normal device operations remain speculative, because direct experimental evidence at defect level has been missing. In this paper, a random-telegraph-signal-based defect-tracking technique (RDT) is developed for probing the location and movements of individual defects and their statistical spatial and energy characteristics in the CF of state-of-the-art hafnium-oxide RRAM devices. For the first time, the critical filament region of the CF is experimentally identified, which is located near, but not at, the bottom electrode with a length of nanometer scale. We demonstrate with the RDT technique that the modification of this key constriction region by defect movements can be observed and correlated with switching operation conditions, providing insight into the resistive switching mechanism. [ABSTRACT FROM PUBLISHER]

In this paper, implication (IMP) operations are demonstrated in a circuit with two SiOx-based memristors and a CMOS transistor. Specifically, a circuit with two one-diode and one-resistor (1D1R) memory elements and a transistor are designed to perform the IMP operations. A circuit consisting of a $4 \times 4$ crossbar 1D1R memristor array together with selection transistors is proposed and used to realize the functionality of a one-bit, full adder in 43 steps. Compared with CMOS logic circuits, the advantages and disadvantages of memristor-enabled logic circuits are discussed. This result suggests that the memristor-enabled logic circuit is most suitable for low-power and high-density applications, as well as a simple and robust approach to realize programmable memcomputing chips compatible with large-scale CMOS manufacturing technology. [ABSTRACT FROM PUBLISHER]

This paper investigated the performance of flexible resistive random access memory devices based on simple spin-coated sol–gel-derived strontium titanate nickelate (STN) thin films on polyethylene terephthalate substrate. A high on/off ratio of 10^5 and a uniform current distribution were demonstrated. The strong bonding between bidentate ligands of nickel (II) acetylacetone and titanium metal ion enabled the chelation effect, which contributed to the stability of the STN thin film, especially for moisture resistivity. Fourier transform infrared spectroscopy analysis was utilized to examine the effects on the resistive switching behaviors after 90 days under an atmospheric environment according to the chelation effect of the STN thin films. The devices were fabricated on a flexible plastic substrate, and they exhibited excellent durability upon repeated bending tests. They demonstrated good potential application for flexible and low-cost memory devices. [ABSTRACT FROM PUBLISHER]

Vertical alignment liquid crystal (LC) cell driven by in-plane field with 3-D polymer network exhibited no pooling mura under an external mechanical pressure; however, the operating voltage of the device was increased, because the polymer network hinders field-induced reorientation of LC. In this paper, we adopted a modified cell structure in which a counter electrode on top substrate of the conventional mode is existed, to improve upon this drawback. The proposed device in which the polymer network is formed in bulk of vertically aligned LC layer shows a very fast response time of 2 ms (rise + decay), 57% reduction in operating voltage, and also keeps image quality although the cell is curved. [ABSTRACT FROM AUTHOR]

In this paper, indium-tin-oxide (ITO) was used to act as both insulator and top electrode in resistive random access memory (RRAM) on identical bottom substrates. This is achieved by cosputtering an ITO target with nitride (N2) or oxygen (O2) gas as the insulator; then capping by an ITO electrode, such that both the rectifier and RRAM characteristics can be achieved before and after a forming process, respectively. In contrast, using pure ITO as an insulator does not exhibit RRAM behavior. To verify the rectifier and RRAM characteristics, material analyses and electrical measurements at various temperatures were conducted. Reliability tests including retention and endurance were also applied to verify the resistance switching stability. Finally, the rectifier and RRAM conduction models were proposed to examine the resistance switching behaviors. By applying the ITO material as both electrode and insulator, the resistance switching characteristic with high reliability is thus obtained. [ABSTRACT FROM AUTHOR]

There has been a strong demand for developing an ultradense and low-power nonvolatile memory technology. In this paper, we present a carbon-based resistive random access memory device with a carbon nanotube (CNT) electrode. An amorphous carbon layer is sandwiched between the fast-diffusing top metal electrode and the bottom CNT electrode, exhibiting a bipolar switching behavior. The use of the CNT electrode can substantially reduce the size of the active device area. We also demonstrate a carbon-based complementary resistive switch (CRS) consisting of two back-to-back connected memory cells, providing a route to reduce the sneak current in the cross-point memory. The bit information of the CRS cell is stored in a high-resistance state, thus reducing the power consumption of the CRS memory cell. This paper provides valuable early data on the effect of electrode size scaling down to nanometer size. [ABSTRACT FROM PUBLISHER]

In this paper, we investigate the influence of the drain electrode on the dynamic switching behavior of AlGaN/GaN high-electron-mobility transistors on Si substrate. By adding a field plate to the drain electrode, a dramatic increase in the dynamic ON-resistance dynR \mathrm{\scriptscriptstyle ON} was identified. The dispersion effect is correlated with the high electric field below the drain field plate (DFP), the onset of which is caused by the full electron depletion from both the channel and the GaN cap layer. We show that the electron distribution is modified by the passivation method, backside bias, or surface charges and, hence, shifts the onset voltage of the trapping effect. Trapped electrons underneath the DFP are thought to be responsible for the measured rise of the dynR \mathrm{\scriptscriptstyle ON} . With the introduction of an extended ohmic drain contact, the influence of a metallization overhang at the drain edge can be suppressed. The detrapping energies associated with the surface defects were determined to 0.2, 0.3, and 0.7 eV, respectively. Simulations and measurements indicate that charges inside the passivation below the DFP worsen the switching behavior. [ABSTRACT FROM AUTHOR]

In this paper, we investigate in depth Forming, SET, and Retention of conductive-bridge random-access memory (CBRAM). A kinetic Monte Carlo model of the CBRAM has been developed considering ionic hopping and chemical reaction dynamics. Based on inputs from ab initio calculations and the physical properties of the materials, the model offers the simulation of both the Forming/SET and the Data Retention operations. It aims to create a bond between the physics at atomic level and the device behavior. From the model and experimental results obtained on decananometric devices, we propose an understanding of the physical mechanisms involved in the CBRAM operations. Using the consistent Forming/SET and Data Retention model, we obtained good agreement with the experimental data. Finally, the impact of each layer of the CBRAM on the Forming/SET behavior is decorrelated, allowing an optimization of the performance. [ABSTRACT FROM AUTHOR]

In this paper, the nonlinear switching mechanism of the Ti/HfO2/Al2O3/TiN crossbar structure resistive random access memory device with good reliability is investigated. The nonlinearity of the device can be revealed by inserting a large bandgap of an Al2O3 thin layer between the TiN bottom electrode and the HfO2 switching film. The nonlinear switching mechanism caused by Flower–Nordheim tunneling involves the tunneling barrier of the Al2O3 layer. Besides, the nonlinear behavior is also sensitive to the thickness of the inserting Al2O3 layer. A high nonlinear factor of 37, large endurance more than 10^4 , and good retention properties are achieved in the Ti/HfO2/Al2O3 (1-nm)/TiN structure. [ABSTRACT FROM AUTHOR]

A compact microelectromechanical (MEM) switch design and associated family of logic gates, memory cells, and other basic very-large-scale integration (VLSI) digital circuit sub blocks are proposed to ensure zero crowbar current in addition to zero leakage current while minimizing mechanical delay. The circuit design methodology introduced in this paper also provides for lower device count and hence lower operating power consumption. A prototype of the MEM switch design is demonstrated. [ABSTRACT FROM PUBLISHER]

A highly transparent resistive random access memory with a configuration of multilayer graphene (MLG)/ Dy2O3 /indium tin oxide (ITO) structure is demonstrated in this paper. The fabricated device is transparent, with 80% transmittance at 550 nm. The MLG/ Dy2O3 /ITO device shows unipolar resistance switching with a low operation current (<100~\muA) , low operation voltage (<1~V) , low power consumption (<100~\muW) , high resistance ratio (>10^4) , fast switching speed (<60~ns) , reliable data retention, and promising cycle endurance properties (>200~cycles) , which makes a step toward the realization of low-power transparent electronics for next-generation nonvolatile memory application. The MLG/ Dy2O3 /ITO device exhibited typical filamentary-conduction-type resistive random access memory behavior and no forming process is required. High resistance state (HRS) increases with a reduced device area while low resistance state (LRS) is insensitive to the device sizes. Moreover, Raman spectra obtained in pristine state, HRS, and LRS indicate that the lower power consumption of MLG/ Dy2O3 /ITO device is attributable to the formation of oxygen graphene layers. [ABSTRACT FROM AUTHOR]

Metal/NiO/Pt films with various electrodes were fabricated to investigate the effects of standard free energy (SFE) on NiO resistive switching devices. By selecting Ti, Ta, Ag, Cu, and Co as the top electrodes (TEs), we found that the switching voltage was inversely proportional to the SFE. The reason for this is attributed to the different thicknesses of the oxidized interface between TE and NiO. Since the thickness of the oxidized interface depends on the SFE, this paper provides an effective way to control and adjust the switching voltage. [ABSTRACT FROM PUBLISHER]

We demonstrate a metal sandwiched Al-doped zinc tin oxide (AZTO) thin-film device to exhibit a characteristic evolution process from Schottky junction diode to resistive-switching random access memory (RRAM) applications. The proposed TiN/Ti/AZTO/Pt device can initially show good rectifying characteristics and high forward-bias current for Schottky diodes. After applying with an electrically triggered forming process, the transition of electrical behavior occurs and evolves from the diode to RRAM characteristics. The RRAM device exhibits the coexistence of bipolar and unipolar resistive-switching modes through the positive-bias forming and reversed-bias forming process, respectively. In addition, the RRAM device with bipolar mode can perform the functionality of multilevel cell storage, while the one with unipolar mode shows stable resistive-switching performance. Furthermore, one-transistor and one-resistor (1T1R) architecture with an RRAM cell connected with a thin-film transistor (TFT) device is developed in this paper. The TFT device using AZTO film as an active channel layer performs good electrical characteristics for a driver in the 1T1R operation scheme. The integration of AZTO-based electronic devices has great potential for increasing the application diversity of metal oxide AZTO thin film as well as the flexibility of circuit design in the emerging optoelectronic technologies. [ABSTRACT FROM PUBLISHER]

In this paper, we study the effect of highly doped n^+/p^+ Si as the bottom electrode on unipolar RRAM with Ni-electrode/\HfOx structure. With heavily doped p^+-Si as the bottom electrode, RRAM devices illustrate the coexistence of the bipolar and the unipolar resistive switching. Meanwhile, by substituting heavily doped n^+-Si, the switching behavior changes to that of the self-rectifying unipolar device. The asymmetry and rectifying reproducible behavior in a n^+-\Si/HfOx/\Ni device resulted from the Schottky barrier of defect states in the \SiOx/\HfOx junction and n^+ Si substrate, but this behavior is not seen for the p^+-Si bottom electrode case. With rectifying characteristics and high forward current density observed in the \Ni/HfOx/\n^{+}\Si device, the sneak current path in the conventional crossbar architecture was significantly suppressed. We believe that the proposed structure is a promising candidate for future crossbar-type RRAM applications. [ABSTRACT FROM AUTHOR]

In this paper, the resistive switching behavior of a single-component-polymer resistive memory device based on polychloro-para-xylylene (parylene-C) is comprehensively studied. With the excellent chemical stability and high process compatibility of parylene-C, an 8 \times 8 crossbar array with a sandwiched structure of parylene-C and active electrodes is fabricated, which can be integrated in the CMOS back-end process and shows great potentials for future transparent, low-cost, flexible, and high-density nonvolatile memory applications. This organic memory device exhibits excellent performance with a \10^7 on/ off current ratio, nanosecond set/reset speed, and low switching voltages, as well as good retention and cycling endurance behaviors. The switching mechanism is systematically investigated with the comparison between active electrodes (Al, Cu, or Ag) and an inert electrode (Pt), as well as the dependence on temperature and device area. [ABSTRACT FROM AUTHOR]

Using the model developed in Part I of this two-part paper, the simulated dc sweep and pulse transient characteristics of a metal oxide resistive random access memory cell are corroborated with the experimental data of \HfOx memory. Key switching features such as the abrupt SET process, gradual RESET process, current fluctuation in the RESET process, and multilevel resistance state distributions are captured by the simulation. The current fluctuation in the RESET process is caused by the competition between the simultaneous oxygen vacancy recombination and generation processes. The origin of the high-resistance state variation and the tail bit problem are attributed to the variation of the tunneling gap distances and the stochastic nature of new Vo generation in the tunneling gap region, respectively. The use of the write–verify technique and a bilayer oxide structure are proposed to achieve a tighter resistance distribution. [ABSTRACT FROM AUTHOR]

Solid-state memory technology is undergoing a renaissance of new materials and novel device concepts for higher scalability as the mainstream technology, i.e., Flash, is approaching physical limits. Emerging memory technologies, which have unique characteristics not available in Flash, are leading transformations in the design of the memory hierarchy. Phase change memory (PCM) is a promising candidate for the next-generation nonvolatile-memory technology. It has been extensively studied for its electrical properties and material scalability. Yet, questions remain unanswered as to what extent a functional PCM cell can be ultimately scaled to and what properties a PCM cell has at the single-digit nanometer scale. In this paper, we demonstrated a fully functional cross-point PCM cell working close to its ultimate size-scaling limit by using carbon nanotubes (CNTs) as the memory electrode. The utilization of CNT electrode brings the lithography-independent critical dimension down to 1.2 nm and contributes to a large reduction of the reset programming current to 1.4 \mu\A and the programming energy to 210 fJ using a 10 ns reset pulse. Measured electrical characteristics validate the advantage of further device area scaling on reducing the programming current of PCM cells and confirm the potential viability of a highly scaled ultradense PCM array down to the bottom electrode contact area that corresponds to a 1.8 nm node technology. [ABSTRACT FROM AUTHOR]

The variation of switching parameters is one of the major challenges to both the scaling and volume production of metal-oxide-based resistive random-access memories (RRAMs). In this two-part paper, the source of such parameter variation is analyzed by a physics-based simulator, which is equipped with the capability to simulate a large number (\sim1000) of cyclic SET–RESET operations. By comparing the simulation results with experimental data, it is found that the random current fluctuation experimentally observed in the RESET processes is caused by the competition between trap generation and recombination, whereas the variation of the high resistance states and the tail bits are directly correlated to the randomness of the trap dynamics. A combined strategy with a bilayer dielectric material and a write-verification technique is proposed to minimize the resistance variation. We describe the simulation methodology and discuss the dc results in Part I. The corroboration of the model and the device optimization strategy will be discussed in Part II. [ABSTRACT FROM AUTHOR]

In this paper, we investigated the forming-free resistive-switching (RS) behavior in the \Ru/REOx/\TaN (\RE =\break \Ce, Pr, Sm, and Eu) memory device using \CeOx, \PrOx, \SmOx, and \EuOx thin films fabricated in a full-room-temperature process. The dominant conduction mechanism of \Ru/REOx\/ \TaN memory devices in the low-resistance state is ohmic behavior, whereas the high-resistance state is space-charge-limited conduction. The \Ru/CeOx \/\TaN devices show a high resistance ratio of > \10^4, reliable data retention for \10^5 \ \s, and stable endurance characteristics for up to 1000 cycles. This result suggests the high concentration of the cerium ions and the low density of chemical defects (oxygen vacancies) in the \CeOx film. The \Ru/CeOx\/\TaN structure memory is a very promising candidate for future nonvolatile RS memory applications. [ABSTRACT FROM AUTHOR]

Nonvolatile memory (NVM) devices based on storage layers, p-n junctions and transistors, such as FLASH, suffer from poor retention at high temperature, high voltage writing, and wear out while cycling. This paper presents the structure, operation, and modeling of a nanoelectromechanical NVM based on the switching of a free electrode between two stable states. This electrode, called the shuttle, has no mechanical anchors and commutes between two positions. It is guided inside an insulator pod. Adhesion forces between the shuttle and fixed electrodes serve to hold the shuttle in stable positions. Smooth metal layers give strong Van der Waals stiction between two surfaces in contact. Memory detection is obtained by probing the conductance between two fixed contacts; the shuttle serves as a switchable open/short electrode. Electromechanical contacts have an ideally large resistance ratio between on and off levels. At microscale, gravity is found to be negligible compared with adhesion forces, which motivates the anchorless design for high-temperature data storage. The model proposed is based on charge induction over the surface of metal electrodes and is validated by finite-element method. Kinematic equations and energy transfers of the shuttle device are explored. Due to its unique anchorless design, the scalability of the anchorless shuttle memory is found to be excellent. [ABSTRACT FROM AUTHOR]

This paper introduces a novel structure for filamentary-conduction-type resistance change memory. The new structure utilizes the fringing field from the top metal electrode to effectively confine the position of the filaments in the cell. Nanoscale (100–50 nm) memory cells are fabricated using nickel oxide (NiO) thin film as the resistance-switching layer to demonstrate the feasibility and functionality of the new structure. The fabricated nanoscale memory cells achieved low reset current (100–200 \mu\A), narrower distribution in low-resistance states, and higher on/off ratio than those of the standard structure. In addition, good scalability down to 50 nm was demonstrated. [ABSTRACT FROM AUTHOR]