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We conducted reliability characterization under reverse-bias stress (i.e., stress at OFF-state with high VDS) on the E-mode GaN metal–insulator–semiconductor field-effect-transistors (MIS-FETs) with various substrate terminations. The MIS-FETs with floating substrate (FS) show worse threshold voltage (VTH) stability than that with a grounded substrate. A non monotonic dependence of VTH shifts and OFF-state time-to-breakdown (tbd) on the positive substrate bias (Vsub) was also observed. The underlying mechanisms are the different impacts of positive Vsub on the drift of electrons and holes during the long-term stress. An important indication is that positive-biased and FS terminations should be restricted at OFF-state in order to obtain good VTH stability in applications of the GaN MIS-FET. [ABSTRACT FROM AUTHOR]

In this paper, we carried out a systematic comparison between the enhancement-mode GaN-based fully recessed metal-insulator-semiconductor field-effect transistors (MIS-FETs) and partially recessed MIS-high-electron-mobility transistors (MIS-HEMTs) with the same gate dielectric stack (LPCVD-SiNx/PECVD-SiNx) that has delivered promising long-term reliability and stability. Despite a moderately larger on-resistance (${R}_{ \mathrm{ON}}$), the MIS-FETs deliver superior ${V}_{\text {TH}}$ uniformity and thermal stability. Under long-term gate bias stress, both the MIS-HEMT and MIS-FET deliver similar small positive-bias temperature instability, while the negative-bias temperature instability of the MIS-HEMT is much larger than that of MIS-FET. The MIS-FET also delivers a higher ${V}_{\text {TH}}$ stability than the MIS-HEMT under dynamic gate bias stress. It is suggested that the differences in ${V}_{\text {TH}}$ stability mainly originate from the different spatial separation between the trap states and the conducting channel, with it being larger in MIS-HEMT than in MIS-FET. [ABSTRACT FROM AUTHOR]