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The ohmic contact resistance (${R}_{C}$), surface resistance (${R}_{S}$), and channel resistance (${R}_{\text {CH}}$) of hydrogen-terminated diamond (H-diamond) MOSFETs were investigated in this study. Planar-type and T-type H-diamond MOSFETs were employed to analyze them. Because no interspaces exist between the source–drain and gate electrodes for the T-type H-diamond MOSFETs, then ${R}_{S}$ is zero. Both planar-type and T-type MOSFETs show low leakage current densities and good operations. By considering the relationships between the total resistance (${R}_{ \mathrm{\scriptscriptstyle ON}}$) and 1/ $\vert $ gate voltage-threshold voltage $\vert $ , ${R}_{C}$ and ${R}_{\text {CH}}$ for the T-type H-diamond MOSFET at a gate voltage of −10.0 V are determined to be 13.8 and 21.8 $\Omega \cdot $ mm, respectively. As ${R}_{C}$ for both MOSFETs is the same, ${R}_{S}$ and ${R}_{\text {CH}}$ for the planar-type H-diamond MOSFET are deduced to be 90.0 and 15.8 $\Omega \cdot $ mm, respectively. ${R}_{S}$ accounts for 75.3% of ${R}_{ \mathrm{\scriptscriptstyle ON}}$ for the planar-type H-diamond MOSFET, which is the main reason for its lower drain current and extrinsic transconductance than those of the T-type MOSFET. Although ${R}_{S}$ is suppressed for the T-type H-diamond MOSFET, ${R}_{C}$ occupies 38.8% of ${R}_{ \mathrm{\scriptscriptstyle ON}}$. To further improve the performance of the H-diamond MOSFETs, it is important to eliminate ${R}_{S}$ and decrease ${R}_{C}$ to further improve the electrical properties of the H-diamond MOSFETs. [ABSTRACT FROM AUTHOR]

Boron-doped diamond (B-diamond) metal–oxide–semiconductor (MOS) capacitor and MOS field-effect transistor (MOSFET) are fabricated on a flat diamond epitaxial layer. Their electrical properties and thermal stabilities after annealing at 500 °C are investigated. Annealing makes the leakage current density of the B-diamond MOS capacitor increase slightly. There is a larger stretch-out for the capacitance-voltage curve in the depletion region after annealing than that before annealing. The drain-current maxima for the as-fabricated and 500 °C-annealed MOSFETs are obtained as −0.49 and −0.60 mA/mm, respectively. Extrinsic transconductance maxima are 18.7 and $21.4~\mu \text{S}$ /mm, respectively. These obtained values are considerably larger than those obtained by the previously reported B-diamond MOSFETs. [ABSTRACT FROM AUTHOR]

In this article, we report the fabrication and characterization of boron-doped diamond (B-diamond) Schottky diodes and MESFETs. Effects of annealing at 573–973 K on the electrical properties of these devices are investigated. Current density maximum for the as-fabricated Schottky diode is 0.05 A/cm2 at a gate voltage of −10.0 V. Annealing at 673 and 973 K makes it increase first to 0.70 A/cm2 and decrease lately to 0.07 A/cm2, respectively. ON/OFF ratios for the as-fabricated B-diamond Schottky diode exceed 4.5 × 108 at the OFF-voltage (VOFF) of 0 V and 3.2 × 106 at VOFF = 42.0 V. For the annealed Schottky diode, the ON/OFF ratios are higher than 1.7 × 106 at VOFF < 6.0} V. Ideality factor and barrier height for Au/Pt bilayer gates on the B-diamond channel layer range from 1.05 to 1.78 and from 1.24 to 1.56 eV, respectively. All three B-diamond MESFETs with the gate lengths of 12.0, 7.0, and 4.3 μm, respectively, operate with p-type channel characteristics. The drain current maxima for the as-fabricated MESFETs are −0.11, −0.16, and −0.39 mA/mm. After annealing at 773 K, these values increase to −0.17, −0.24, and −0.55 mA/mm. Annealing at 773 K also increases the extrinsic transconductance maxima for the three MESFETs from 11.1, 11.0, and 10.4μS/mm to 18.6, 16.2, and 14.4 μS/mm, respectively. [ABSTRACT FROM AUTHOR]

An Al2O3 thin film is assembled on an unin- tentionally doped ZnO for metal–insulator–semiconductor (MIS) capacitors. Leakage current density (J), capacitance–voltage (C - V) properties, and their thermal stabilities are investigated. The J -values for the MIS capacitors before and after annealing at 300 °C are lower than 2.0 × 10−7 A/cm2 at a gate voltage of −10.0 ~ 10.0V. Frequency-dependent C-V characteristic shows a stable maximum capacitance for the MIS capacitor before annealing. However, it decreases dramatically at 1 MHz for that after annealing at 300 C, which is attributed to the change of ZnO channel resistance. Flat band voltage shifts in the–curves after annealing at 300 C are one order lower than those before annealing, indicating the decrease of positive fixed charge density in the Al2O3 film. There are ledge phenomena for hysteresis characteristics in the curves, which result possibly from the delayed evacuation of minority carriers in deep depletion region. By considering the Fowler–Nordheim tunneling model, band configurations of the Al2O3/ZnO heterojunctions are clarified to be straddling gap structures with conduction band offsets larger than 1.3 eV. [ABSTRACT FROM AUTHOR]