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This paper presents an optimization of voice coil motor (VCM) used in ultra-precision motion stages based on an improved magnetic equivalent circuit (MEC) model. The modified MEC model takes into consideration the nonlinear saturation effect of ferromagnetic material by segmentation, and estimates the magnetic flux density in air gap of VCM in a more precise way. The results of experiment, finite-element analysis, and MEC model are compared to validate the correctness of the improved MEC method. A new optimization criterion is used to measure dynamic response and heat dissipation of VCM simultaneously. The geometric parameters of VCM are optimized, and the resulting VCM is proved to have a better dynamic response and lower heat dissipation. [ABSTRACT FROM PUBLISHER]

This paper presents a new 2-D permanent-magnet array for a planar motor, in which the angle between the magnetization directions of any two adjacent magnets is 457deg;. The harmonic model for flux density distribution of the array is solved by the scalar magnetic potential equation and validated by the finite-element method. An analytical model for real-time control is derived by taking the first harmonic of the magnetic flux density distribution. The ignored higher harmonics in z-component of the magnetic flux density distribution is minimized by the genetic algorithm such that the analytical model becomes more accurate. Compared with the well-known Halbach magnet array, the proposed magnet array has lower higher harmonic components and higher z-component of the magnetic flux density, which will reduce the force ripples of the planar motor. [ABSTRACT FROM AUTHOR]