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We developed a small-sized micromachined probe for the measurement of biological properties using microelectromechanical systems (MEMS) technology. We also experimentally showed the suitability of the micromachined probe for biological applications through in vivo, as well as in vitro measurements of various types of tissue. We measured the permittivities of 0.9% saline and the muscle and fat of pork using the micromachined probe after liquid calibration. The measured permittivities of 0.9% saline and pork agreed well with both the expected values of the Cole-Cole equation along with the measured values obtained through the use of a 1-mm-diameter open-ended coaxial probe. We also performed in vivo measurements of breast cancer tissue implanted in an athymic nude mouse to show the suitability of the small-sized micromachined probe for practical biological applications. Through the obtained data, the capability of the micromachined probe of distinguishing different tissue types from one another was shown. The actual aperture size of the micromachined probe is only 240 /spl mu/m /spl times/ 70 /spl mu/m and, therefore, we can extract the biological information from very small biological tissues and drastically decrease the invasiveness of this method through the implementation of the small probe created through the use of MEMS technology.

Broad-band analog and digital reflection-type phase shifters (RTPSs), showing constant phase shift over 1:3 bandwidth, have been developed using microelectromechanical systems (MEMS) technology. Two-unit RTPSs centered at two different frequencies have been cascaded to achieve flat phase responses over a wide frequency band. Each phase shifter uses air-gap overlay coplanar-waveguide couplers for low-loss 3-dB coupling and bridge-type MEMS capacitors for reflective terminations. The fabricated analog phase shifter shows the average insertion loss of 3.5 dB, and maximum phase error of /spl plusmn/4.9/spl deg/ from 15 to 45 GHz. The 2-bit digital RTPS shows reduced maximum phase error of /spl plusmn/2.8/spl deg/ together with a comparable insertion loss of 3.1 dB from 5 to 15 GHz. The details of the circuit design, analysis, and fabrication procedures are presented together with the measurement results. Compared with the similar constant phase shifters using semiconductor diodes and transistors, the micromachined RTPS of this study shows superior performance in terms of phase errors, insertion losses, and bandwidth.

This paper presents a new type of antenna fabricated by micromachining technology for mechanical beam steering with two degrees of freedom of motion. A V-band two-dimensional mechanical beam-steering antenna was designed and fabricated on a single high-resistivity silicon substrate using microelectromechanical systems technologies. A fabricated antenna is driven by magnetic force to overcome the limit of electrostatic actuation, and a polymer-based hinge structure is used to increase the maximum scanning angle to as much as 40/spl deg/. Simulation result for validating the mechanical beam-steering concept is presented. In addition, mechanical properties such as static actuation angles are investigated together with microwave properties such as the return loss and radiation pattern at the V-band.

Low-loss digital distributed phase shifters have been developed using micromachined capacitive shunt switches for V-band applications. Instead or conventional metal-insulator-metal capacitors, high-Q metal-air-metal capacitors were used in series with the microelectromechanical system (MEMS) shunt capacitive switches to minimize the dielectric loss. The operation voltage for the phase shifters was also reduced by applying the bias directly to the MEMS shunt switches through choke spiral inductors. Fabricated 2-b (270/spl deg/) and 4-b (337.5/spl deg/) distributed phase shifters showed low average insertion losses of 2.2 dB at 60 GHz and 2.8 dB at 65 GHz, respectively. The average phase errors for 2-b and 4-b phase shifters were 6.5% and 1.3%, respectively. The return losses are better than 10 dB over a wide frequency range from 40 to 70 GHz. Most of the circuits operated at 15-35-V bias voltages. These phase shifters present promising solution to low-loss integrated phase shifting devices at the V-band and above.