1. Heavy-ion-induced soft breakdown of thin gate oxides
- Author
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Bin Wang, John F. Conley, A.H. Johnston, Eric M. Vogel, Joseph Bernstein, John S. Suehle, and T. Miyahara
- Subjects
Nuclear and High Energy Physics ,Materials science ,business.industry ,Quantum point contact ,Oxide ,Linear energy transfer ,Time-dependent gate oxide breakdown ,Thermal conduction ,Fluence ,chemistry.chemical_compound ,Nuclear Energy and Engineering ,chemistry ,Optoelectronics ,Microelectronics ,Irradiation ,Electrical and Electronic Engineering ,business - Abstract
Heavy-ion-induced soft and hard breakdown are investigated in thin gate oxides as a function of linear energy transfer, fluence, and voltage applied during irradiation. It is found that postirradiation oxide conduction is well described by the Sune quantum point contact model.
- Published
- 2001
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