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1. Spurious Source/Drain Underlap of Large Junction Area NFET's.

Author

Hook, Terence B.

Subjects
*FIELD-effect transistors, *PRODUCTION engineering, *INJECTION lasers
Abstract

Presents information on a study which described a sporadic underlap of some particular field-effect transistor on the scribe line. Determination of the minimal allowed capacitance; Manufacturing data; Process solution; Conclusion.

Published
1999
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