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Start Over Author "Choi, Dongil" Search Limiters Full Text Journal ieee transactions on semiconductor manufacturing
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1. Wafer Level Variability Improvement by Spatial Source/Drain Activation and Ion Implantation Super Scan for FinFET Technology

Author

Wang, Yanzhen, primary, Yong, Yoong Hooi, additional, Liu, Bingwu, additional, Zhou, Dibao, additional, Togo, Mitsuhiro, additional, Choi, Dongil, additional, Lee, Jae Gon, additional, Lo, Hsien-Ching, additional, Dou, Xinyuan, additional, Gu, Sipeng, additional, Shintri, Shashidhar, additional, Tong, Weihua, additional, Sargunas, Vidmantas, additional, and Argandona, Jorge, additional

Published
2018
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