1. Novel High-K SOI LDMOS with N+ Buried Layer.
- Author
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Wu, Lijuan, Huang, Ye, Song, Yue, Zhu, Lin, and Wu, Yiqing
- Subjects
BREAKDOWN voltage ,PATH integrals ,DIELECTRIC materials ,DOPING agents (Chemistry) ,ELECTRIC fields ,HIGH voltages - Abstract
A novel high-K dielectric trench SOI LDMOS with an interface highly doped N buried layer (HKHN SOI LDMOS) is proposed. The devices are characterized with a high-K dielectric material (HK) introduced in the drift region and a high doping concentration of N existed below the HK trench (HKHN). First, the HK material causes assistant depletion in the N-drift region to increase doping concentration of the drift region (N
d ) and further improve the electric field (E-field) distribution. Second, the highly doped N buried layer below the interface of the HK trench can provide a low on-resistance passage and shorten the ionization integral path to enhance bulk field (ENBULF). Both the high drift region doping concentration and low on-resistance passage can reduce the specific on-resistance (Ron,sp ). Meanwhile, a higher breakdown voltage (BV) can be obtained by an optimized electric field distribution and a shortened ionization integration path. The new device can achieve high BV, low Ron,sp and excellent figure of merit (FOM = BV2 /Ron,sp ). The BV of the HKHN SOI LDMOS is 552 V with Ron,sp of 29.46 mΩ cm2 and FOM of 10.343 MW cm−2 . [ABSTRACT FROM AUTHOR]- Published
- 2022
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