1. Design and Application of a Laser Confocal Probe
- Author
-
L. An, Y. M. Fan, Zurong Qiu, D. F. Lv, Jia Qin, and G. X. Zhang
- Subjects
Signal processing ,Materials science ,business.industry ,General Chemical Engineering ,Confocal ,Photoelectric effect ,Gauge (firearms) ,Laser ,Signal ,law.invention ,Optics ,Optical path ,law ,Pinhole (optics) ,business ,Instrumentation ,General Environmental Science - Abstract
To achieve the aim of precise measurement of a target micro‐sphere, approximately 0.2 mm in diameter, a laser confocal probe was designed. To improve the output signal, a mathematical model of the photoelectric signal was proposed. The diameter of the pinhole was determined, and the optical path was adjusted; the oscillating units were designed. The performance of the probe was validated by experiments using gauge blocks combined with a micro‐motion measuring mount model. Besides, a more accurate signal processing method was suggested.
- Published
- 2007
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