Search

Your search keyword '"Lee, W. J."' showing total 9 results
Start Over Author "Lee, W. J." Journal integrated ferroelectrics
9 results on '"Lee, W. J."'

9. NANOMIXED TiO2-Ga2O3 THIN FILMS GROWN BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) METHOD.

Author

Liu, G. X., Shan, F. K., Lee, W. J., Lee, G. H., Kim, I. S., and Shin, B. C.

Subjects
THIN films, TITANIUM dioxide, GALLIUM, BAND gaps, ENERGY-band theory of solids
Abstract

Various TiO2-Ga2O3 nanomixed thin films were prepared by plasma enhanced atomic layer deposition with alternating supplies of reactant sources, Ti[N(CH3)2]4, [(CH)2GaNH2]3 and oxygen plasma. The surface morphologies of the thin films indicated that the nanomixed thin films were uniform and smooth. Ga and Ti were uniformed distributed on entire nanomixed thin film, and no carbon contaminations were detected inside the thin film. The electrical properties of Pt/film/Si structure were investigated. The first layer of the nanomixed thin films with different materials annealed at same conditions showed the different behaviors. Transmittances of the nanomixed thin films deposited on quartz substrates were also investigated, and the band gap energies were calculated by fitting the absorption edge of the transmittance spectra. [ABSTRACT FROM AUTHOR]

Published
2006
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results