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In this paper, we present experimental results on the noise spectrum, which we used to investigate chaotic noise caused by nonlinear magnetic excitation. In addition, a newly designed sensor structure for possible suppression of noise and an increase in signal level is presented. High frequency carrier-type thin film sensors (also called GMI sensors) are expected to have a sub-pT resolution at room temperature when used for biomagnetic measurements.

A cantilevered actuator is fabricated in this study by sputter deposition using amorphous Fe72Si14B14 as the magnetostrictive material. The displacement of the cantilever is observed with applying the magnetic field of 10 kA/m to the width direction of the cantilever. Results show that the displacement of the cantilever increased with decreasing substrate thickness, and has a peak value at the thickness of the magnetic thin film of 0.5 mum when the substrate thickness is 7.5 mum.

In this paper, a wireless magnetic motion capture system for multi-marker detection was developed. The system's accuracy in detecting the positions and orientations was also examined.

The authors propose a new system for sensing the position of a slim marker using phase detection to enhance position accuracy. A slim wireless LC resonated marker (1.2 mm in diameter and 10 mm long) was fabricated and a detector was formed by connecting high-speed AD converters. The system has a position accuracy of around 1 mm, and it can be used for highly accurate position sensing without magnetic shielding because it is free from earth field.

In this paper, a micropump with spiral-type magnetic micromachine was fabricated and the flow rate of the pump was then experimentally evaluated. The pump system proposed in this work is suitable for the micro-fluid devices because they can control the very small flow rate quantitatively and the flow rate was independent of the viscosity of the fluid.