1. Kinetic simulation of inductively coupled plasma (ICP) sources
- Author
-
M.R. Gibbons and D.W. Hewett
- Subjects
Physics ,Discretization ,Physics::Plasma Physics ,Ionization ,Electric field ,Electron ,Plasma ,Inductively coupled plasma ,Atomic physics ,Plasma processing ,Computational physics ,Magnetic field - Abstract
Summary form only given, as follows. We have developed a new algorithm, the Darwin direct implicit particle-in-cell (DADIPIC) method, for particle simulation of low frequency, non-neutral phenomena in plasmas. One of the difficulties in simulating plasmas lies in the enormous disparity between the fundamental scale lengths of a plasma and the scale lengths of the phenomena of interest. We have chosen to combine two methods, Darwin and direct implicit, to eliminate the constraints c/spl Delta/x//spl Delta/t
- Published
- 1995
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