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A VOx microbolometer coupled with thin-film spiral antenna was fabricated on a fused-quartz substrate by metal–organic decomposition (MOD). The size of the bolometer was 1 ×52 µm2, and the antenna was designed for operating at 75–110 GHz. The DC sensitivity and responsivity of the bolometer were 540 W-1 and 124 V/W at the bias current of 0.5 mA under the irradiation of a 94 GHz electromagnetic wave, respectively. These values were over one order higher than those of the Bi microbolometer, which is conventionally utilized as a detector in terahertz and infrared regions. The antenna-coupled VOx microbolometer with a high responsivity was realized by MOD. [ABSTRACT FROM AUTHOR]