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Abstract Preparing organometal halide perovskite array thin films from solution is a big challenge due to its soluble nature. In this work, we provide a fast chemical vapor-solid reaction (FCVR) for fabricating perovskite array thin films. An elemental Pb array thin film was firstly prepared by magnetron sputtering using a shadow mask, which then converted to CH 3 NH 3 PbI 3 arrays by reacting with CH 3 NH 3 I. The related photoelectric characteristics were investigated by Uv–Vis spectroscopy, photoluminescence spectroscopy, and transient photovoltage analysis. The photodetector devices were assembled using these resultant perovskite thin films, which showed a fast response with 3 ms rise time and 3 ms decay time both under 405 nm and 660 nm light illumination. The response was faster than the commercial photodetector. This FCVR method not only provides a high quality perovskite array thin film, but also a novel synthesis strategy for new organic-inorganic hybrid perovskite photoelectric materials. Graphical abstract Image 1 Highlights • Fast chemical vapor-solid reaction (FCVR) was used for perovskite fabrication. • Perovskite array thin films can be easily fabricated by FCVR method. • Fast time response photodetectors were assembled. [ABSTRACT FROM AUTHOR]