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Abstract Gallium-diffused lithium niobate (LiNbO 3) channel optical thin-film was fabricated by diffusion of photolithographically patterned gallium-oxide stripes on a Z-cut congruent LiNbO 3 substrate. Composition, optical properties of the channel thin-film and gallium diffusion profiles were characterized. The results show that the thin-film is in congruent composition environment, confines single-mode ordinary and extraordinary waves with a loss <0.5 dB/cm at 1.5 μm wavelength. The confined mode field follows Gaussian/Hermite-Gaussian profile in the width/depth direction of the channel thin-film, and shows definite anisotropy. The diffused gallium ions follow a sum of two error functions in the width and a Gaussian function in the depth direction of the channel optical thin-film. Two-dimensional gallium concentration and refractive index profiles in the channel thin-film are modeled. [ABSTRACT FROM AUTHOR]

Ti-diffused LiTaO 3 strip waveguide was fabricated by in-diffusion of 8-μm-wide, 100-nm-thick Ti-strip at 1300 °C for 6 h in wet O 2 atmosphere. Its composition, surface morphology, lattice parameter, optical properties and Ti profile characteristics were fully characterized. It is shown that the waveguide is in the congruent composition environment. The waveguide surface caves in ∼70 nm below the crystal surface due to Ti-induced lattice contraction, which is verified by X-ray single-crystal diffraction. Optical characterizations show that the waveguide well supports both TE and TM single-mode propagation at the 1.5 μm wavelength, is polarization-insensitive, and has a loss of 0.4 (0.3) dB/cm for the TM (TE) mode. Secondary ion mass spectrometry analysis shows that the Ti profile follows a sum of two error functions in the width direction and a Gaussian function in the depth direction of the waveguide. [ABSTRACT FROM AUTHOR]