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Abstract: Secondary ion mass spectrometry (SIMS) was used to study the diffusion properties of Mg2+ and Ti4+ ions in a peculiar optical-damage-resistant near-stoichiometric (NS) Ti:Mg:LiNbO3 waveguide structure that a number of strip waveguides are embedded in a planar waveguide. The structure was fabricated on an initially congruent, undoped Z-cut substrate with a technological process in sequence of planar waveguide, strip waveguide, MgO diffusion and post Li-rich vapor transport equilibration (VTE) treatment. The results show that the Mg2+-profiles in both strip and planar waveguide layers are desirably homogeneous with a concentration 1.7±0.3mol% above the optical damage concentration threshold. The Ti4+-profile in the strip waveguide follows a sum of two error functions along the lateral direction with a width 13±1.0μm and a sum of two Gaussian functions in the depth direction with a 1/e depth of ∼11μm all. The Ti4+ ions in the planar waveguide obey a Gaussian profile. From the measured profiles, characteristic diffusion parameters such as mean Mg2+ and Ti4+ diffusivities and surface Ti4+-concentration are evaluated. The diffusivity is discussed in comparison with the previously reported results on single Mg2+, Ti4+ diffusion and Mg2+/Ti4+ co-diffusion in pure (or bulk MgO-doped), congruent (or NS) LiNbO3 crystal. Finally, the keys to the succeeding in fabrication are highlighted. [Copyright &y& Elsevier]

Ti-diffused LiTaO 3 strip waveguide was fabricated by in-diffusion of 8-μm-wide, 100-nm-thick Ti-strip at 1300 °C for 6 h in wet O 2 atmosphere. Its composition, surface morphology, lattice parameter, optical properties and Ti profile characteristics were fully characterized. It is shown that the waveguide is in the congruent composition environment. The waveguide surface caves in ∼70 nm below the crystal surface due to Ti-induced lattice contraction, which is verified by X-ray single-crystal diffraction. Optical characterizations show that the waveguide well supports both TE and TM single-mode propagation at the 1.5 μm wavelength, is polarization-insensitive, and has a loss of 0.4 (0.3) dB/cm for the TM (TE) mode. Secondary ion mass spectrometry analysis shows that the Ti profile follows a sum of two error functions in the width direction and a Gaussian function in the depth direction of the waveguide. [ABSTRACT FROM AUTHOR]