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Your search keyword '"Kashiwagi, M."' showing total 1 results
Start Over Author "Kashiwagi, M." Topic epitaxy Journal journal of applied physics
1 results on '"Kashiwagi, M."'

1. Effect of interfacial oxide on solid-phase epitaxy of Si films deposited on Si substrates.

Author

Mizushima, I., Kuwano, H., Hamasaki, T., Yoshii, T., and Kashiwagi, M.

Subjects
EPITAXY, SILICON, SOLID-liquid interfaces
Abstract

Investigates the effects of interfacial oxide on defect generation and regrowth rate in solid-phase epitaxy of amorphized silicon. Influence of interfacial oxygen on a solid-phase epitaxy process; Evaluation of interfacial oxide layer; Reduction of interfacial oxygen concentration by silicon ion implantation.

Published
1988
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