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Your search keyword '"Chang, Chun"' showing total 2 results
Start Over Author "Chang, Chun" Topic thin films Journal journal of applied physics
2 results on '"Chang, Chun"'

1. Effect of boron doping on the structural properties of polycrystalline silicon films grown at reduced pressures.

Author

Lin, Horng-Chih, Lin, Hsiao-Yi, Chang, Chun-Yen, Jung, Tz-Gwei, Wang, P. J., Deng, Ray-Chern, and Lin, Jandel

Subjects
*BORON, *DOPED semiconductors, *THIN films, *SILICON, *CHEMICAL vapor deposition
Abstract

Deals with a study which investigated the deposition and properties of in situ boron-doped polycrystalline silicon films, using an ultrahigh vacuum chemical vapor deposition system. Details of polycrystalline silicon films deposited with low pressure chemical vapor deposition techniques; Methodology of the study; Results and discussion.

Published
1994
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2. Deposition and device application of in situ boron-doped polycrystalline SiGe films grown at low temperatures.

Author

Lin, Horng-Chih, Jung, Tze-Guei, Lin, Hsiao-Yi, Chang, Chun-Yen, Lei, Tan-Fu, Wang, P. J., Deng, Ray-Chern, Lin, Jandel, and Chao, Chih-Yeh

Subjects
*POLYCRYSTALLINE semiconductors, *CHEMICAL vapor deposition, *THIN films
Abstract

Presents a study which investigated the deposition of in situ boron-doped polycrystalline silicon-germanium films grown at low temperatures. Use of an ultrahigh-vacuum/chemical-vapor deposition system in the study; Description of the system; Experimental details.

Published
1993
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