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Recent experimental studies have demonstrated that the Electrostatic Force Distance Curve (EFDC) can be used for space charge probing in thin dielectric layers. Experiments highlight that this method seems to be sensitive to charge localization. However, the relative contributions of charge distribution parameters (density, lateral/in-depth spreading) remain unknown. The aim of this paper is to determine the contribution of each charge distribution parameters to EFDC. To reach this aim, we have developed an electrostatic and an electromechanical model to simulate EFDC over a charge cloud trapped in a thin dielectric layer. Hence, the EFDC sensitivity to charge localization could be investigated through the shape parameters of the charge cloud and by extracting the respective contributions from the atomic force microscopy tip and the cantilever. [ABSTRACT FROM AUTHOR]

Electric Force-Distance Curves (EFDC) is one of the ways whereby electrical charges trapped at the surface of dielectric materials can be probed. To reach a quantitative analysis of stored charge quantities, measurements using an Atomic Force Microscope (AFM) must go with an appropriate simulation of electrostatic forces at play in the method. This is the objective of this work, where simulation results for the electrostatic force between an AFM sensor and the dielectric surface are presented for different bias voltages on the tip. The aim is to analyse force-distance curves modification induced by electrostatic charges. The sensor is composed by a cantilever supporting a pyramidal tip terminated by a spherical apex. The contribution to force from cantilever is neglected here. A model of force curve has been developed using the Finite Volume Method. The scheme is based on the Polynomial Reconstruction Operator-PRO-scheme. First results of the computation of electrostatic force for different tip-sample distances (from 0 to 600 nm) and for different DC voltages applied to the tip (6 to 20 V) are shown and compared with experimental data in order to validate our approach. [ABSTRACT FROM AUTHOR]