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Domain engineering technology in lithium tantalate is a well studied approach for nonlinear optical applications. However, for several cases of interest, the realization of short period structures (<2 μm) is required, which make their characterization difficult with standard techniques. In this work, we show that high resolution x-ray diffraction is a convenient approach for the characterization of such structures, allowing us to obtain in a nondestructive fashion information such as the average domain period, the domain wall inclination, and the overall structure quality. [ABSTRACT FROM AUTHOR]