1. Mo/Ti multilayer Bragg reflector for LiNbO3 film bulk acoustic wave resonators
- Author
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Wu Chuangui, Shitian Huang, Tao Yang, J. H. Zhao, Lu Lv, Wanli Zhang, Wenbo Luo, Yao Shuai, Ying Xing, and Xiaoyuan Bai
- Subjects
010302 applied physics ,Materials science ,business.industry ,General Physics and Astronomy ,Reflector (antenna) ,02 engineering and technology ,Substrate (electronics) ,021001 nanoscience & nanotechnology ,Distributed Bragg reflector ,01 natural sciences ,Resonator ,chemistry.chemical_compound ,chemistry ,Benzocyclobutene ,0103 physical sciences ,Electrode ,Optoelectronics ,Wafer ,Thin film ,0210 nano-technology ,business - Abstract
A 43° rotated Y-cut LiNbO3 (LN) single-crystal thin film coated with a bottom electrode and a Mo/Ti Bragg reflector is successfully transferred onto the 4-in. LN wafer substrate by means of crystal-ion-slicing (CIS) technique and benzocyclobutene bonding method. The multilayer film is crack-free, and the Mo/Ti reflector shows good acoustic reflection efficiency. A thin film bulk acoustic wave resonator based on the Mo/Ti Bragg reflector and the LN thin film (LN-BAW) is prepared, and the properties are further analyzed. The results indicate that the LN-BAW provides a large Kt2 of ∼16.63% and the Q-factor and figure-of-merit of the LN-BAW reach 183 and 30.4, respectively.
- Published
- 2020
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