6 results on '"Kakuta, Shigeru"'
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2. Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy
3. Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures.
4. Frequency dependence on the structure of radio frequency glow discharges in Ar.
5. Study of the structure in rf glow discharges in SiH4/H2 by spatiotemporal optical emission spectroscopy: Influence of negative ions.
6. Study of the structure in rf glow discharges in SiH4/H2by spatiotemporal optical emission spectroscopy: Influence of negative ions
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