1. Comparative study of the breakdown transients of thin Al2O3 and HfO2 films in MIM structures and their connection with the thermal properties of materials
- Author
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Sebastian M. Pazos, Salvatore Lombardo, Felix Palumbo, Enrique Miranda, and Fernando L. Aguirre
- Subjects
010302 applied physics ,Work (thermodynamics) ,Materials science ,High-K ,Oxide ,General Physics and Astronomy ,Thermal Conductivity ,purl.org/becyt/ford/1.3 [https] ,02 engineering and technology ,Dielectric ,Dissipation ,Mim ,021001 nanoscience & nanotechnology ,01 natural sciences ,purl.org/becyt/ford/1 [https] ,chemistry.chemical_compound ,Thermal conductivity ,chemistry ,0103 physical sciences ,Thermal ,Progressive Breakdown ,Composite material ,0210 nano-technology ,Material properties ,Voltage - Abstract
In this work, the breakdown transients of Al2O3- and HfO2 based metal-insulator-metal (MIM) stacks with the same oxide thickness and identical metal electrodes were compared. Their connection with the thermal properties of the materials was investigated using alternative experimental setups. The differences and similarities between these transients in the fast and progressive breakdown regimes were assessed. According to the obtained results, Al2O3 exhibits longer breakdown transients than HfO2 and requires a higher voltage to initiate a very fast current runaway across the dielectric film. This distinctive behavior is ascribed to the higher thermal conductivity of Al2O3. Overall results link the breakdown process to the thermal properties of the oxides under test rather than to dissipation effects occurring at the metal electrodes. Fil: Pazos, Sebastián Matías. Universidad Tecnológica Nacional. Facultad Regional Buenos Aires; Argentina. Comisión Nacional de Energía Atómica; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Aguirre, Fernando Leonel. Universidad Tecnológica Nacional. Facultad Regional Buenos Aires; Argentina. Comisión Nacional de Energía Atómica; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Miranda, Enrique. Universitat Autònoma de Barcelona; España Fil: Lombardo, Salvatore. Consiglio Nazionale delle Ricerche; Italia Fil: Palumbo, Félix Roberto Mario. Universidad Tecnológica Nacional. Facultad Regional Buenos Aires; Argentina. Comisión Nacional de Energía Atómica; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
- Published
- 2017